CUDOS article in Nature Communications

Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size was published in Nature Communications on 19 June, 2013.


Written by Zongsong Gan, Yaoyu Cao and Min Gu from the Swinburne CMP CUDOS group, together with Richard A. Evans from CSIRO Materials Science and Engineering. This research has paved the way towards portable three-dimensional maskless laser direct writing with resolution fully comparable to electron beam lithography.